Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method

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标题

Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method
授权日

1900-01-01
公开（公告）号

US20140349428A1
申请日

2013-12-06
公开（公告）日

2014-11-27
当前申请（专利权）人

SAMSUNG DISPLAY CO., LTD.
发明人

HAN, JEONG-WON
简单同族

CN104183796A | CN104183796B | JP2014227604A | JP6293544B2 | KR1020140139360A | KR102081282B1 | TW201444991A | TWI606128B | US20140349428A1 | US8936956
简单同族成员数量

10
简单同族被引用专利总数

12
诉讼案件数

0
法律状态/事件

授权 | 权利转移