标题:
Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
当前申请(专利权)人:
KONINKLIJKE PHILIPS N.V.
发明人:
DIRKSEN, PETER | VAN DER LUGT, ANTHONIE
简单同族:
CN101969856A | CN101969856B | EP2207484A2 | EP2207484B1 | US20100207485A1 | US8327521 | WO2009037655A2 | WO2009037655A3