标题:
Vapor deposition device, vapor deposition method, and organic el display device
当前申请(专利权)人:
SHARP KABUSHIKI KAISHA
发明人:
KAWATO, SHINICHI | INOUE, SATOSHI | SONODA, TOHRU | HASHIMOTO, SATOSHI
简单同族:
CN103340013A | CN103340013B | JP2013237931A | JP5766239B2 | JPWO2012124512A1 | KR101502715B1 | KR1020130119495A | US20130337597A1 | US9240572 | WO2012124512A1