标题:
Vapor deposition device, vapor deposition method and organic el display device
当前申请(专利权)人:
SHARP KABUSHIKI KAISHA
发明人:
KAWATO, SHINICHI | INOUE, SATOSHI | SONODA, TOHRU
简单同族:
CN103210113A | CN103210113B | JP5291839B2 | JPWO2012086453A1 | KR101305847B1 | KR1020130066706A | US20130240870A1 | WO2012086453A1